5

STI process steps for sub-quarter micron CMOS

Year:
1998
Language:
english
File:
PDF, 599 KB
english, 1998
26

Effective defect entrainment in lamp zone melting of Si films on insulator

Year:
1986
Language:
english
File:
PDF, 4.26 MB
english, 1986
28

CMOS devices and circuits made in lamp-ZMR SOI films

Year:
1988
Language:
english
File:
PDF, 1.14 MB
english, 1988
31

Improved shallow trench isolation for sub-halfmicron CMOS

Year:
1991
Language:
english
File:
PDF, 208 KB
english, 1991
36

Issues for logic CMOS integration in Systems on a Chip (SoC)

Year:
2000
Language:
english
File:
PDF, 1014 KB
english, 2000